On the other hand, so that you can procedure the crystal is extremely Innovative production procedures are necessary. Because the dawn of the crystal, engaged on this challenge, we at the moment are the only business on the globe which can be processed in this crystal.
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We summarized the current development standing from the superior-ability DUV laser each at the wavelength of FHG in the one-μm laser and at 193 nm. The latest progress in the solid-state/fiber laser, plus the nonlinear optical crystals, prompts not simply the common energy and also the beam top quality (coherence) of the DUV lasers to an unprecedented amount.
The standard electric power from the NIR laser nonetheless has the possible to become enhanced to tens of watts for example 70 W [26] if the double-go configuration could possibly be used to the Yb:YAG SCF amplifier phase. That's why, if the conversion effectiveness of 31% from NIR to DUV could be even now managed at this larger ability affliction, the average output electrical power on the DUV laser at 258 nm might be in excess of twenty W, which might be a amazing power degree to the DUV laser and bring about the unanticipated DUV laser machining benefits. What's more, for top-ability DUV laser, the UV damage of the nonlinear crystal, such as the windows for CLBO crystal as well as the mirrors, is another essential parameter for long term and secure Procedure.
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Mainly because of the thermal lens outcome from the good-point out lasers, In case the heating management is inadequate, It is far from uncomplicated to obtain the strong-point out laser using a superior electricity along with a higher beam high-quality concurrently. Not too long ago, with the event of The skinny disk laser and single-crystal fiber (SCF) laser, a substantial-ability laser at the fundamental wavelength (1 μm) were recognized with a fantastic beam high quality In spite of a TEM00 manner beam [four,24], which might be excellent candidates for the basic of your DUV laser generation. Yet another applicant for the basic is definitely the high-energy fiber laser which could possibly be attained by coherent beam mixture with M2 value less than one.
On another aspect, the power scaling of the NIR laser is yet another part to improve the common electrical power of the 193-nm DUV laser. Due to the insufficient the high-ability amplification Option in the NIR laser more info (as an example at 1553 nm), nonlinear frequency processes which include optical parameter oscillation (OPO) may very well be applied to produce a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength as well as acquiring relative increased electricity [21]. Lately, a diamond Raman laser showed its potential in achieving a higher ability and also a high conversion efficiency in the 1st Stokes in the 1-μm laser [22,23], which suggests the possibility for being applied inside the 193-nm DUV laser era as a result of its higher Raman acquire and large frequency shift.
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The beam profile demonstrated in Figure 7b demonstrated a very good beam high quality as among the list of deserves of Raman laser, which might be beneficial to make a 193-nm DUV laser with a top quality beam.
The conversion effectiveness from essential NIR to DUV is from 5% to 36% in accordance with the documented leads to Desk 1. Raising the conversion efficiency will lessen the burden on the design and setup of the elemental laser amplifier in addition to the electric powered electric power consumption. A fantastic beam quality of the basic laser will likely contribute on the expanding in the conversion effectiveness and the appropriate electricity depth with the NIR and environmentally friendly laser within the SHG and FHG approach, respectively. The very best conversion efficiencies from NIR to environmentally friendly and green to DUV laser by use of CLBO crystal are 70% and close to fifty%, respectively [twelve], which corresponds into the conversion performance of 35% from elementary to DUV.
The development of your 193-nm laser was demonstrated by levels of SFG. To be able to scale the DUV laser ability efficiently, a completely new notion with the 193-nm DUV laser generation is presented according to the diamond Raman laser.